November 18, according to foreign media reports, as the world’s only supplier of extreme ultraviolet lithography to chip makers, ASML ASMAChas launched TWINSCAN NXE:3400C, TWINSCAN NXE:3600D and other models of extreme ultraviolet lithography, in a steady stream of delivery to TSMC, Samsung Electronics and other customers.
In addition to the TWINSCAN NXE series, ASML is also developing high numerical aperture EUV lithography for more advanced processes at 2nm and below.
For the high numerical aperture EUV lithography, ASML CEO and President Peter Vinik revealed at a press conference in Seoul, Korea this week that shipments will begin in 2024 at a price of 300 million to 350 million euros (about 2.586 billion yuan) per unit.
In terms of the prices revealed by Peter Vinik, the high numerical aperture extreme ultraviolet lithography is priced much higher than the TWINSCAN NXE series extreme ultraviolet lithography they are currently delivering.
ASML financial report shows that they completed delivery of 12 units in both the second and third quarters of the year, and in terms of their revenue and share, the average price per unit in the second quarter was about 166 million euros, and the average price in the third quarter was about 181 million euros, both under 200 million euros.
From the news announced on the ASML website, their high numerical aperture extreme ultraviolet lithography machine, which will be named EXE series, will increase from 0.33 to 0.55 numerical aperture, with two models, TWINSCAN EXE:5000 and TWINSCAN EXE:5200, the former has started to get orders from customers in 2018, and the latter has also started to get orders since the fourth quarter of last year. orders since the fourth quarter of last year.